Plasma treatment system CD 600 PLC

Process chamber Material : aluminium. Inside dimensions : 600 x 600 x 600 mm. Volume : 216 litres,1 door. Door : with viewing glass. Trays : 5, dimensions : 522 x 500 x 40 mm. Vacuum measurement Pirani gauge. Vacuum pump 60 m³ per hour rotary vane pump with PFPE-fluid. RF generator Standard : 1000 W, kHz. Process control PLC with colour touch screen. The PLC : - runs the process automatically, - defines different processes as recipes, - checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of RF generator, - monitors all parameters correctly within preset % of the machine setting, - uses an operator, process/maintenance password. Temperature Digital display with over temperature interlock. Electricity 380V AC, 3-phase, 50Hz, 40A. Process gas 1 gas line with MFC (Mass Flow Controller). Process gas connection 1/4 "-Swagelock-fitting, input pressure 1 Bar. Exhaust connection 28 mm diameter. Safety features Emergency-off-switch, vacuum interlock, CE-label.